Invention Grant
- Patent Title: Semiconductor structure and manufacturing method of the same
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Application No.: US15962434Application Date: 2018-04-25
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Publication No.: US10727272B2Publication Date: 2020-07-28
- Inventor: Harry-Hak-Lay Chuang , Sheng-Huang Huang , Keng-Ming Kuo , Hung Cho Wang
- Applicant: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY LTD.
- Applicant Address: TW Hsinchu
- Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY LTD.
- Current Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY LTD.
- Current Assignee Address: TW Hsinchu
- Agency: WPAT, P.C., Intellectual Property Attorneys
- Agent Anthony King
- Main IPC: H01L27/22
- IPC: H01L27/22 ; H01L43/12 ; H01L43/08 ; H01L43/02

Abstract:
The present disclosure provides a semiconductor structure, including a logic region and a memory region. The memory region includes a first Nth metal line of an Nth metal layer, a magnetic tunneling junction (MTJ) over first Nth metal line, a carbon-based layer between the first Nth metal line and the MTJ, and a first (N+M)th metal via of an (N+M)th metal layer. A method of manufacturing the semiconductor structure is also disclosed.
Public/Granted literature
- US20190165041A1 SEMICONDUCTOR STRUCTURE AND MANUFACTURING METHOD OF THE SAME Public/Granted day:2019-05-30
Information query
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