Invention Grant
- Patent Title: Method of fabricating organic light-emitting diode touch display screen
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Application No.: US16327833Application Date: 2018-12-03
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Publication No.: US10727284B2Publication Date: 2020-07-28
- Inventor: Xiaoliang Feng
- Applicant: WUHAN CHINA STAR OPTOELECTRONICS SEMICONDUCTOR DISPLAY TECHNOLOGY CO., LTD.
- Applicant Address: CN Wuhan, Hubei
- Assignee: Wuhan China Star Optoelectronics Semiconductor Display Technology Co., Ltd.
- Current Assignee: Wuhan China Star Optoelectronics Semiconductor Display Technology Co., Ltd.
- Current Assignee Address: CN Wuhan, Hubei
- Agent Mark M. Friedman
- Priority: com.zzzhc.datahub.patent.etl.us.BibliographicData$PriorityClaim@15f784d5
- International Application: PCT/CN2018/119017 WO 20181203
- Main IPC: H01L21/00
- IPC: H01L21/00 ; H01L27/32 ; G06F3/041

Abstract:
A method of fabricating an organic light-emitting diode (OLED) touch display screen is provided and has steps of forming a thin film transistor (TFT) layer, an OLED layer, and a touch layer on a base substrate sequentially. Compared with prior art, upon fabricating a touch layer, a first insulating layer is not etched after depositing the first insulating layer and before depositing a bridging point layer. After depositing and forming a second insulating layer, the first and second insulating layers are dry-etched together using combination of two etching gases to achieve fabricating two different depths contact holes in the touch layer in a same process, which effectively reduces erosion of the OLED by a wet-etching process, simplifies a producing process, improves device-producing capacity, and simultaneously achieves a pre-protection effect on touch lines and bonding pads in a source-drain electrode layer to avoid functional failure caused by over-etching or oxidation.
Public/Granted literature
- US20200161380A1 METHOD OF FABRICATING ORGANIC LIGHT-EMITTING DIODE TOUCH DISPLAY SCREEN Public/Granted day:2020-05-21
Information query
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