Invention Grant
- Patent Title: Methods of manufacturing driving substrates, driving substrates and display apparatuses
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Application No.: US16414757Application Date: 2019-05-16
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Publication No.: US10727296B2Publication Date: 2020-07-28
- Inventor: Huan Liu
- Applicant: Kunshan Go-Visionox Opto-Electronics Co., Ltd.
- Applicant Address: CN Kunshan
- Assignee: Kunshan Go-Visionox Opto-Electronics Co., Ltd.
- Current Assignee: Kunshan Go-Visionox Opto-Electronics Co., Ltd.
- Current Assignee Address: CN Kunshan
- Agency: Kilpatrick Townsend & Stockton, LLP
- Priority: com.zzzhc.datahub.patent.etl.us.BibliographicData$PriorityClaim@2c0355a8
- Main IPC: H01L49/02
- IPC: H01L49/02 ; H01L27/12 ; H01L21/66 ; H01L21/02 ; C23C16/40 ; H01L21/285 ; C23C16/52 ; C23C16/34

Abstract:
Exemplary embodiments of the present disclosure provide methods of manufacturing driving substrates, including: obtaining a first thickness value of the first dielectric layer based on a difference between loads of all first storage capacitors of a specially-shaped display driving area and loads of all second storage capacitors of a normal display driving area; providing a substrate and depositing a first metal layer on a surface of the substrate; controlling a film forming process parameter by using a film thickness control model, and depositing the first dielectric layer and the second dielectric layer on a surface of the first metal layer, so that a thickness of the first dielectric layer reaches a first thickness value and a thickness of the second dielectric layer reaches a second thickness value larger than the first thickness value. A driving substrate and a display apparatus are also disclosed.
Public/Granted literature
- US20190273128A1 METHODS OF MANUFACTURING DRIVING SUBSTRATES, DRIVING SUBSTRATES AND DISPLAY APPARATUSES Public/Granted day:2019-09-05
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