Invention Grant
- Patent Title: Gate contact structure for a transistor
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Application No.: US16548335Application Date: 2019-08-22
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Publication No.: US10727308B2Publication Date: 2020-07-28
- Inventor: Ruilong Xie , Hao Tang , Cheng Chi , Daniel Chanemougame , Lars W. Liebmann , Mark V. Raymond
- Applicant: GLOBALFOUNDRIES Inc.
- Applicant Address: KY Grand Cayman
- Assignee: GLOBALFOUNDRIES INC.
- Current Assignee: GLOBALFOUNDRIES INC.
- Current Assignee Address: KY Grand Cayman
- Agency: Amerson Law Firm, PLLC
- Main IPC: H01L29/417
- IPC: H01L29/417 ; H01L21/768 ; H01L29/66 ; H01L21/285 ; H01L23/535 ; H01L29/45 ; H01L29/08 ; H01L29/78 ; H01L29/165

Abstract:
One device disclosed herein includes a gate above a semiconductor substrate, the gate comprising a gate structure and a gate cap, and conductive source/drain metallization structures adjacent the gate, each of the conductive source/drain metallization structures having a front face and a recess defined in each of the conductive source/drain metallization structures. In this example, the device further includes a spacer structure comprising recess filling portions that substantially fill the recesses and a portion that extends across a portion of the upper surface of the gate cap, wherein a portion of the gate cap is exposed within the spacer structure, an insulating material within the spacer structure and on the exposed portion of the gate cap, a gate contact opening that exposes a portion of an upper surface of the gate structure, and a conductive gate contact structure in the conductive gate contact opening.
Public/Granted literature
- US20190378900A1 GATE CONTACT STRUCTURE FOR A TRANSISTOR Public/Granted day:2019-12-12
Information query
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