Invention Grant
- Patent Title: Method for producing tunnel magnetoresistive element
-
Application No.: US16478492Application Date: 2018-01-17
-
Publication No.: US10727402B2Publication Date: 2020-07-28
- Inventor: Yasuo Ando , Mikihiko Oogane , Kosuke Fujiwara , Koujirou Sekine , Junichi Jono , Masaaki Tsuchida
- Applicant: TOHOKU UNIVERSITY , KONICA MINOLTA, INC.
- Applicant Address: JP Miyagi JP Tokyo
- Assignee: TOHOKU UNIVERSITY,KONICA MINOLTA, INC.
- Current Assignee: TOHOKU UNIVERSITY,KONICA MINOLTA, INC.
- Current Assignee Address: JP Miyagi JP Tokyo
- Agency: Holtz, Holtz & Volek PC
- Priority: com.zzzhc.datahub.patent.etl.us.BibliographicData$PriorityClaim@27f70108
- International Application: PCT/JP2018/001085 WO 20180117
- International Announcement: WO2018/139276 WO 20180802
- Main IPC: H01L43/12
- IPC: H01L43/12 ; H01F41/22 ; H01L43/08 ; H01L43/10 ; G01R33/09 ; H01F10/16

Abstract:
A method for producing a tunnel magnetoresistive element includes a stacking step, then in-magnetic field heating, and then dry etching. The stacking includes stacking a B absorption layer which is in contact with an upper surface of a CoFeB layer. The dry etching includes removal of layers to the B absorption layer. An end of etching is set as an end point time detected by an analysis device when a final layer before the B absorption layer directly above the CoFeB layer is exposed has reduced to a prescribed level, or when the B absorption layer directly above the CoFeB layer has increased to the prescribed level. An amount of over-etching after the end point time is specified in advance, and the B absorption layer is stacked such that the thickness from the prescribed level to the upper surface of the CoFeB layer corresponds to the over-etching amount.
Public/Granted literature
- US20190393411A1 METHOD FOR PRODUCING TUNNEL MAGNETORESISTIVE ELEMENT Public/Granted day:2019-12-26
Information query
IPC分类: