- Patent Title: Piezoelectric vibration member and method of manufacturing the same
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Application No.: US15623553Application Date: 2017-06-15
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Publication No.: US10727803B2Publication Date: 2020-07-28
- Inventor: Kazuyuki Noto
- Applicant: Murata Manufacturing Co., Ltd.
- Applicant Address: JP Nagaokakyo-Shi, Kyoto-Fu
- Assignee: MURATA MANUFACTURING CO., LTD.
- Current Assignee: MURATA MANUFACTURING CO., LTD.
- Current Assignee Address: JP Nagaokakyo-Shi, Kyoto-Fu
- Agency: Arent Fox LLP
- Priority: com.zzzhc.datahub.patent.etl.us.BibliographicData$PriorityClaim@23910a82
- Main IPC: H03H3/04
- IPC: H03H3/04 ; H01L23/10 ; H03H3/02 ; H03H9/10 ; H03H9/02 ; H01L41/253

Abstract:
A piezoelectric vibration member that includes a substrate having a main surface on or in which a piezoelectric vibration member is mounted, a lid having a recess that is open so as to face the main surface and which includes a flange portion that projects outward from an opening edge of the recess, and a bonding layer that bonds the substrate and the lid together so as to hermetically seal the piezoelectric vibrator in a space between the recess and the main surface. The surface roughness of a side surface of the flange portion is greater than the surface roughness of the surface of the recess, and the bonding layer extends from the main surface of the substrate to the side surface of the flange portion.
Public/Granted literature
- US20170302242A1 PIEZOELECTRIC VIBRATION MEMBER AND METHOD OF MANUFACTURING THE SAME Public/Granted day:2017-10-19
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