Invention Grant
- Patent Title: Bulk acoustic wave resonator with multilayer piezoelectric structure
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Application No.: US15826039Application Date: 2017-11-29
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Publication No.: US10727809B2Publication Date: 2020-07-28
- Inventor: Jyothi Swaroop Sadhu , Maria Wang
- Applicant: Qorvo US, Inc.
- Applicant Address: US NC Greensboro
- Assignee: Qorvo US, Inc.
- Current Assignee: Qorvo US, Inc.
- Current Assignee Address: US NC Greensboro
- Agency: Withrow & Terranova, P.L.L.C.
- Main IPC: H03H9/60
- IPC: H03H9/60 ; H03H9/56 ; H03H9/17 ; H03H9/205 ; H03H9/13 ; H03H9/02 ; H03H9/58

Abstract:
A bulk acoustic wave (BAW) resonator has a bottom electrode, a top electrode over the bottom electrode, and a multilayer piezoelectric structure between the bottom electrode and the top electrode. The multilayer piezoelectric structure has a first piezoelectric layer having a first electromechanical coupling coefficient and a second piezoelectric layer having a second electromechanical coupling coefficient that is different than the first electromechanical coupling coefficient.
Public/Granted literature
- US20180175826A1 BULK ACOUSTIC WAVE RESONATOR WITH MULTILAYER PIEZOELECTRIC STRUCTURE Public/Granted day:2018-06-21
Information query
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