Invention Grant
- Patent Title: Method for conditioning polishing pad and polishing apparatus
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Application No.: US15760590Application Date: 2016-08-31
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Publication No.: US10730161B2Publication Date: 2020-08-04
- Inventor: Taichi Yasuda , Masanao Sasaki , Tatsuo Enomoto , Takuya Sasaki , Kazumasa Asai
- Applicant: SHIN-ETSU HANDOTAI CO., LTD.
- Applicant Address: JP Tokyo
- Assignee: SHIN-ETSU HANDOTAI CO., LTD.
- Current Assignee: SHIN-ETSU HANDOTAI CO., LTD.
- Current Assignee Address: JP Tokyo
- Agency: Oliff PLC
- Priority: com.zzzhc.datahub.patent.etl.us.BibliographicData$PriorityClaim@3f744aa9
- International Application: PCT/JP2016/003963 WO 20160831
- International Announcement: WO2017/056392 WO 20170406
- Main IPC: B24B1/00
- IPC: B24B1/00 ; B24B37/005 ; B24B53/017 ; B24B53/12 ; B24B53/00 ; B24B37/00 ; B24B37/10 ; B24B37/08 ; H01L21/67

Abstract:
A method for conditioning a polishing pad, which is configured to polish a wafer and attached to a rotatable discoid turntable, by using a conditioning head, the method being characterized by: moving the conditioning head in a radial direction of the turntable to perform the conditioning while rotating the polishing pad attached to the turntable by rotation of the turntable; and controlling a rotational speed of the turntable and a moving speed of the conditioning head in the radial direction of the turntable in correspondence with a distance of the conditioning head from a center of the turntable. Consequently, the method for conditioning a polishing pad which enables appropriately conditioning an entire polishing surface of the polishing pad can be provided.
Public/Granted literature
- US20180264618A1 METHOD FOR CONDITIONING POLISHING PAD AND POLISHING APPARATUS Public/Granted day:2018-09-20
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