Invention Grant
- Patent Title: System and method for vacuum film lamination
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Application No.: US15863761Application Date: 2018-01-05
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Publication No.: US10730276B2Publication Date: 2020-08-04
- Inventor: Chieh Chen , Chung-Shu Liao , Ping-Lin Wu , Hsiuwen Wang
- Applicant: MAVEN OPTRONICS CO., LTD.
- Applicant Address: TW Hsinchu County
- Assignee: Maven Optronics Co., Ltd.
- Current Assignee: Maven Optronics Co., Ltd.
- Current Assignee Address: TW Hsinchu County
- Agency: Foley & Lardner LLP
- Priority: com.zzzhc.datahub.patent.etl.us.BibliographicData$PriorityClaim@156579e2 com.zzzhc.datahub.patent.etl.us.BibliographicData$PriorityClaim@3a060c61
- Main IPC: B29C43/56
- IPC: B29C43/56 ; B32B37/10 ; B32B7/12 ; B32B37/06 ; B32B37/00 ; H01L27/15 ; H01L33/50 ; H01L21/67 ; B32B37/12 ; B32B39/00 ; B32B41/00 ; H01L33/60 ; B32B38/00 ; H01L25/075

Abstract:
A vacuum system for film lamination, including a vacuum chamber module, a film-pressing module, a substrate susceptor module and a hot-plate heating module, is disclosed, wherein the film-pressing module includes a film-pressing platen, and the substrate susceptor module includes a substrate susceptor supported by a spring-loaded mechanism. During a film-lamination process, the film-pressing platen is actuated to move downwards to attach a laminating film onto a substrate, and the substrate susceptor is actuated to move downwards and finally rest on the hot-plate heating module. Therefore an adhesive glue disposed between the laminating film and the substrate can be thermally cured. After completing the film-lamination process, the film-pressing platen is actuated upwards so that the substrate susceptor also is actuated to move upwards to its initial position by a restoring force exerted by the spring-loaded mechanism. In such manner, the laminating film can be properly bonded to the substrate to avoid lamination defects such as air bubbles and to improve adhesion strength.
Public/Granted literature
- US20180201007A1 SYSTEM AND METHOD FOR VACUUM FILM LAMINATION Public/Granted day:2018-07-19
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