Invention Grant
- Patent Title: Film forming method
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Application No.: US16009326Application Date: 2018-06-15
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Publication No.: US10731255B2Publication Date: 2020-08-04
- Inventor: Manabu Honma , Yuka Nakasato , Kohei Doi
- Applicant: TOKYO ELECTRON LIMITED
- Applicant Address: JP Tokyo
- Assignee: TOKYO ELECTRON LIMITED
- Current Assignee: TOKYO ELECTRON LIMITED
- Current Assignee Address: JP Tokyo
- Agency: Nath, Goldberg & Meyer
- Agent Jerald L. Meyer
- Priority: com.zzzhc.datahub.patent.etl.us.BibliographicData$PriorityClaim@2143093
- Main IPC: C23C16/455
- IPC: C23C16/455 ; C23C16/458 ; C23C16/52 ; C23C16/511 ; C23C16/34

Abstract:
A film forming method comprises loading a substrate on a rotary table, forming an adsorption region for adsorbing a raw material gas to the substrate by discharging the raw material gas from multiple discharge ports, forming a reaction region, to which a reaction gas is supplied, at a position spaced from the adsorption region, separating an atmosphere of the adsorption region and an atmosphere of the reaction region by exhausting and by supplying a purge gas, forming a film by performing a cycle a plurality of times to deposit the reaction product on the substrate, the cycle comprising passing the substrate through the adsorption region and the reaction region and setting a combination of flow rates of the raw material gas for a first pattern in order to perform the cycle with the first pattern and for a second pattern in order to perform the cycle with the second pattern.
Public/Granted literature
- US20180363134A1 FILM FORMING METHOD, FILM FORMING APPARATUS, AND COMPUTER READABLE STORAGE MEDIUM Public/Granted day:2018-12-20
Information query
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