Group III nitride laminate and vertical semiconductor device having the laminate
Abstract:
A group III nitride laminate having monocrystalline n-type AlxGa1-xN (0.7≤X≤1.0) and an electrode is provided. The group III nitride laminate is characterized in that an n-type contact layer made of (AlYGa1-Y)2O3 (0.0≤Y
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