Invention Grant
- Patent Title: Apparatus for measuring temperature of power device using piezoelectric device, apparatus for reducing thermal stress, and method for manufacturing the same
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Application No.: US15573568Application Date: 2016-05-13
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Publication No.: US10732053B2Publication Date: 2020-08-04
- Inventor: Sang Won Yoon , Min Ki Kim
- Applicant: INDUSTRY-UNIVERSITY COOPERATION FOUNDATION HANYANG UNIVERSITY
- Applicant Address: KR Seoul
- Assignee: Industry-University Cooperation Foundation Hanyang University
- Current Assignee: Industry-University Cooperation Foundation Hanyang University
- Current Assignee Address: KR Seoul
- Agency: Sughrue Mion, PLLC
- Priority: com.zzzhc.datahub.patent.etl.us.BibliographicData$PriorityClaim@68918f21 com.zzzhc.datahub.patent.etl.us.BibliographicData$PriorityClaim@5c71f1ee
- International Application: PCT/KR2016/005107 WO 20160513
- International Announcement: WO2016/182396 WO 20161117
- Main IPC: G01K5/56
- IPC: G01K5/56 ; H01L41/08 ; H01L41/257 ; H01L41/113 ; G01K5/72 ; G01L1/16
Abstract:
An apparatus for measuring a temperature of a power device using a piezoelectric device according to an exemplary embodiment of the present disclosure includes: a substrate; at least one power device formed on one surface of the substrate; and at least one piezoelectric device disposed on the substrate as spaced from the power device and configured to measure a thermal stress generated on the substrate to sense a temperature caused by heat generation of the power device.
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