Invention Grant
- Patent Title: Optical imaging arrangement with a piezoelectric device
-
Application No.: US15912959Application Date: 2018-03-06
-
Publication No.: US10732402B2Publication Date: 2020-08-04
- Inventor: Yim-Bun Patrick Kwan , Axel Lorenz , Jasper Wesselingh
- Applicant: Carl Zeiss SMT GmbH
- Applicant Address: DE Oberkochen
- Assignee: Carl Zeiss SMT GmbH
- Current Assignee: Carl Zeiss SMT GmbH
- Current Assignee Address: DE Oberkochen
- Agency: Fish & Richardson P.C.
- Priority: com.zzzhc.datahub.patent.etl.us.BibliographicData$PriorityClaim@396cae00
- Main IPC: G02B26/08
- IPC: G02B26/08 ; G03F7/20 ; G02B27/00

Abstract:
An optical imaging arrangement includes an optical element and a piezoelectric device. The optical element includes an optical element body carrying an optical surface on a front side of the optical element body. The piezoelectric device includes a first electrode and at least one piezoelectric element. The first electrode is configured to cooperate with the at least one piezoelectric element and at least one second electrode, when the at least one second electrode is located on a rear side of the optical element body and the at least one piezoelectric element is located between the first electrode and the at least one second electrode, the rear side of the optical element body being opposite to the front side of the optical element body. The first electrode is located on the front side of the optical element body, and the at least one piezoelectric element is formed by at least one piezoelectric section of the optical element body.
Public/Granted literature
- US20180196253A1 OPTICAL IMAGING ARRANGEMENT WITH A PIEZOELECTRIC DEVICE Public/Granted day:2018-07-12
Information query