Invention Grant
- Patent Title: Imprint apparatus and article manufacturing method
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Application No.: US15091096Application Date: 2016-04-05
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Publication No.: US10732522B2Publication Date: 2020-08-04
- Inventor: Takamitsu Komaki , Yoshiyuki Usui , Nozomu Hayashi
- Applicant: CANON KABUSHIKI KAISHA
- Applicant Address: JP Tokyo
- Assignee: Canon Kabushiki Kaisha
- Current Assignee: Canon Kabushiki Kaisha
- Current Assignee Address: JP Tokyo
- Agency: Canon U.S.A., Inc. I.P. Division
- Priority: com.zzzhc.datahub.patent.etl.us.BibliographicData$PriorityClaim@596396e2
- Main IPC: G03F9/00
- IPC: G03F9/00 ; G03F7/00

Abstract:
An imprint apparatus for forming a pattern on an imprinting material includes an alignment unit that detects a mold-side mark formed on a mold and a substrate-side mark formed on the substrate, forming a mark pair, and aligns the mold and the substrate on the basis of a detection result. The alignment unit obtains, by using the detection result of a first mark pair and the detection result of a second mark pair, which is different from the first mark pair, positional deviation information of the first mark pair and positional deviation information of the second mark pair in the same direction; obtains a determination value by using the positional deviation information of the first mark pair and the positional deviation information of second mark pair; and determines that mark detection is abnormal when the determination value is not in an allowable range.
Public/Granted literature
- US20160299444A1 IMPRINT APPARATUS AND ARTICLE MANUFACTURING METHOD Public/Granted day:2016-10-13
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