Invention Grant
- Patent Title: Rare-earth oxide based erosion resistant coatings for semiconductor application
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Application No.: US14729950Application Date: 2015-06-03
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Publication No.: US10734202B2Publication Date: 2020-08-04
- Inventor: Jennifer Sun , Biraja P. Kanungo , Tom Cho
- Applicant: Applied Materials, Inc.
- Applicant Address: US CA Santa Clara
- Assignee: Applied Materials, Inc.
- Current Assignee: Applied Materials, Inc.
- Current Assignee Address: US CA Santa Clara
- Agency: Lowenstein Sandler LLP
- Main IPC: B32B1/02
- IPC: B32B1/02 ; B32B5/00 ; H01J37/32 ; C23C16/44 ; C04B41/87 ; C04B41/00 ; C04B41/50 ; C23C4/11 ; C23C4/134
Abstract:
An article includes a body that is coated with a ceramic coating. The ceramic coating may include Y2O3 in a range between about 45 mol % to about 99 mol %, ZrO2 in a range between about 1 mol % to about 55 mol %, and Al2O3 in a range between about 1 mol % to about 10 mol %. The ceramic coating may alternatively include Y2O3 in a range between about 45 mol % to about 99 mol % and Al2O3 in a range between about 1 mol % to about 10 mol %. The ceramic coating may alternatively include Y2O3 in a range between about 45 mol % to about 99 mol % and ZrO2 in a range between about 1 mol % to about 55 mol %.
Public/Granted literature
- US20150270108A1 RARE-EARTH OXIDE BASED EROSION RESISTANT COATINGS FOR SEMICONDUCTOR APPLICATION Public/Granted day:2015-09-24
Information query
