Invention Grant
- Patent Title: Semiconductor processing boat design with pressure sensor
-
Application No.: US16594736Application Date: 2019-10-07
-
Publication No.: US10734263B2Publication Date: 2020-08-04
- Inventor: Ai-Tee Ang , Hsiu-Jen Lin , Wei-Hung Lin , Ming-Da Cheng , Chung-Shi Liu
- Applicant: Taiwan Semiconductor Manufacturing Company, Ltd.
- Applicant Address: TW Hsin-Chu
- Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.
- Current Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.
- Current Assignee Address: TW Hsin-Chu
- Agency: Slater Matsil, LLP
- Main IPC: H01L21/673
- IPC: H01L21/673 ; B23K3/08 ; B23K1/00 ; H01L21/67 ; H01L21/68

Abstract:
Presented herein is a device processing boat comprising a base and at least one unit retainer disposed in the base. The device further comprises a cover having at least one recess configured to accept and retain at least one unit. The at least one recess is aligned over, and configured to hold the at least one unit over, at least a portion of the at least one unit retainer. The cover is retained to the device processing boat by the at least one unit retainer. At least one pressure sensor having at least one sensel is disposed in the base. The sensel is configured to sense a clamping force applied by the cover to the at least one unit.
Public/Granted literature
- US20200035529A1 SEMICONDUCTOR PROCESSING BOAT DESIGN WITH PRESSURE SENSOR Public/Granted day:2020-01-30
Information query
IPC分类: