Invention Grant
- Patent Title: Wafer container with external passive getter module
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Application No.: US15573311Application Date: 2016-05-12
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Publication No.: US10734264B2Publication Date: 2020-08-04
- Inventor: Jeffrey J. King , Matthew A. Fuller , John Burns , Martin Forbes
- Applicant: ENTEGRIS, INC.
- Applicant Address: US MA Billerica
- Assignee: ENTEGRIS, INC.
- Current Assignee: ENTEGRIS, INC.
- Current Assignee Address: US MA Billerica
- Agency: Entegris, Inc.
- International Application: PCT/US2016/032206 WO 20160512
- International Announcement: WO2016/183376 WO 20161117
- Main IPC: H01L21/673
- IPC: H01L21/673 ; H01L23/00

Abstract:
A semiconductor wafer container assembly includes a container defining an exterior and defining an interior having a wafer storage area adapted to support one or more semiconductor wafers. The container also defines an opening in the container between the exterior and the interior. The container has a door and a latching mechanism to sealingly secure the door closed, and the door is openable for access to the wafer storage area. A passive getter module is removably secured with respect to the exterior of the container by substantially rigid connection structure that is a part of or extends from substantially rigid getter module housing. Getter material is disposed within the housing to decrease concentration of contaminants within the wafer storage area of the container via the access opening and the opening in the container.
Public/Granted literature
- US20180138065A1 WAFER CONTAINER WITH EXTERNAL PASSIVE GETTER MODULE Public/Granted day:2018-05-17
Information query
IPC分类: