Invention Grant

Conveyance system
Abstract:
A conveyance system includes: a first track and a second track arranged parallel in a vertical direction such that device ports are positioned therebelow and on one side thereof; a plurality of overhead conveyance vehicles configured to travel along each of the first track and the second track and each convey a FOUP, and storage shelves provided below and on the other side of the first track and the second track and each configured to have the FOUP placed thereon. Each of the overhead conveyance vehicles includes: a gripping unit capable of gripping the FOUP; a movement mechanism capable of moving the gripping unit to a position above the device ports or above the storage shelves; and a hoisting mechanism capable of raising and lowering the gripping unit, which has been moved to the position above each thereof by the movement mechanism.
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