- Patent Title: Modularity of Tec-Cell, FOUP and substrate containers and carriers
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Application No.: US16117278Application Date: 2018-08-30
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Publication No.: US10734268B1Publication Date: 2020-08-04
- Inventor: Fachri Atamny , Gerhard Dovids , Yves Fenner
- Applicant: MURATA MACHINERY, LTD.
- Applicant Address: JP Kyoto
- Assignee: MURATA MACHINERY, LTD.
- Current Assignee: MURATA MACHINERY, LTD.
- Current Assignee Address: JP Kyoto
- Agency: Keating & Bennett, LLP
- Main IPC: H01L21/677
- IPC: H01L21/677 ; H01L21/673 ; H01L21/687 ; G05B19/418 ; B65G1/14

Abstract:
Methods, systems and apparatuses for an improved wafer and substrate carrier or container with improved modularity. More specifically, to a carrier or container with improved abilities which may provide high or low density carriers or containers with improved interchanging and compatibility, including for Tec-Cells, FOUPs, and other third party containers, carriers, modules, rings or any other systems, structures, apparatuses, or methods associated. The invention may provided an ability to interchange or be cross-compatible such as wherein Tec-Cell carriers, containers, rings or modules may be provided to be housed in a FOUP or other third party carrier or wherein substrates or wafers held in the Tec-Cell Carriers, rings, containers, or modules, and then held within the FOUP.
Information query
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