Invention Grant
- Patent Title: Semiconductor device having work-function metal and method of forming the same
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Application No.: US16459889Application Date: 2019-07-02
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Publication No.: US10734288B2Publication Date: 2020-08-04
- Inventor: Juyoun Kim
- Applicant: Samsung Electronics Co., Ltd.
- Applicant Address: KR Gyeonggi-do
- Assignee: Samsung Electronics Co., Ltd.
- Current Assignee: Samsung Electronics Co., Ltd.
- Current Assignee Address: KR Gyeonggi-do
- Agency: Harness, Dickey & Pierce, P.L.C.
- Priority: com.zzzhc.datahub.patent.etl.us.BibliographicData$PriorityClaim@3732d7e5
- Main IPC: H01L21/8238
- IPC: H01L21/8238 ; H01L29/49 ; H01L29/51 ; H01L27/092 ; H01L27/088 ; H01L21/28 ; H01L29/66 ; H01L21/84 ; H01L27/12

Abstract:
In a semiconductor device, a first active area, a second active area, and a third active area are formed on a substrate. A first gate electrode is formed on the first active area, a second gate electrode is formed on the second active area, and a third gate electrode is formed on the third active area. The first gate electrode has a first P-work-function metal layer, a first capping layer, a first N-work-function metal layer, a first barrier metal layer, and a first conductive layer. The second gate electrode has a second capping layer, a second N-work-function metal layer, a second barrier metal layer, and a second conductive layer. The third gate electrode has a second P-work-function metal layer, a third capping layer, a third N-work-function metal layer, and a third barrier metal layer. The third gate electrode does not have the first and second conductive layers.
Public/Granted literature
- US20190326181A1 SEMICONDUCTOR DEVICE HAVING WORK-FUNCTION METAL AND METHOD OF FORMING THE SAME Public/Granted day:2019-10-24
Information query
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