- Patent Title: Metallic interconnect, a method of manufacturing a metallic interconnect, a semiconductor arrangement and a method of manufacturing a semiconductor arrangement
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Application No.: US16148316Application Date: 2018-10-01
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Publication No.: US10734352B2Publication Date: 2020-08-04
- Inventor: Irmgard Escher-Poeppel , Khalil Hosseini , Johannes Lodermeyer , Joachim Mahler , Thorsten Meyer , Georg Meyer-Berg , Ivan Nikitin , Reinhard Pufall , Edmund Riedl , Klaus Schmidt , Manfred Schneegans , Patrick Schwarz
- Applicant: Infineon Technologies AG
- Applicant Address: DE Neubiberg
- Assignee: Infineon Technologies AG
- Current Assignee: Infineon Technologies AG
- Current Assignee Address: DE Neubiberg
- Agency: Murphy, Bilak & Homiller, PLLC
- Priority: com.zzzhc.datahub.patent.etl.us.BibliographicData$PriorityClaim@66ed52d5
- Main IPC: H01L23/00
- IPC: H01L23/00

Abstract:
A metallic interconnection and a semiconductor arrangement including the same are described, wherein a method of manufacturing the same may include: providing a first structure including a first metallic layer having protruding first microstructures; providing a second structure including a second metallic layer having protruding second microstructures; contacting the first and second microstructures to form a mechanical connection between the structures, the mechanical connection being configured to allow fluid penetration; removing one or more non-metallic compounds on the first metallic layer and the second metallic layer with a reducing agent that penetrates the mechanical connection and reacts with the one or more non-metallic compounds; and heating the first metallic layer and the second metallic layer at a temperature causing interdiffusion of the first metallic layer and the second metallic layer to form the metallic interconnection between the structures.
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