- Patent Title: Semiconductor memory device and method of manufacturing the same
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Application No.: US16284395Application Date: 2019-02-25
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Publication No.: US10734406B2Publication Date: 2020-08-04
- Inventor: Hiroyuki Yamasaki , Hideaki Harakawa
- Applicant: Toshiba Memory Corporation
- Applicant Address: JP Minato-ku
- Assignee: Toshiba Memory Corporation
- Current Assignee: Toshiba Memory Corporation
- Current Assignee Address: JP Minato-ku
- Agency: Oblon, McClelland, Maier & Neustadt, L.L.P.
- Priority: com.zzzhc.datahub.patent.etl.us.BibliographicData$PriorityClaim@4e337d02
- Main IPC: H01L27/1157
- IPC: H01L27/1157 ; H01L27/11582 ; G11C16/04 ; G11C16/08 ; H01L27/11565 ; G11C16/26

Abstract:
According to one embodiment, a semiconductor memory device includes first conductive films, a second conductive film, a first pillar including a first semiconductor film and a first insulator, a second semiconductor film, and a second pillar including a second insulator and a third conductive film. The first conductive films are stacked with respective insulator layers interposed therebetween. The second conductive film is provided above the first conductive films with an insulator layer interposed therebetween. The first semiconductor film penetrate the first conductive films in a stacking direction of the first conductive films. The first insulator is provided on a side surface of the first semiconductor film.
Public/Granted literature
- US20200066749A1 SEMICONDUCTOR MEMORY DEVICE AND METHOD OF MANUFACTURING THE SAME Public/Granted day:2020-02-27
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