Invention Grant
- Patent Title: Pad structure for backside illuminated (BSI) image sensors
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Application No.: US16055330Application Date: 2018-08-06
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Publication No.: US10734429B2Publication Date: 2020-08-04
- Inventor: Ching-Hung Cheng , Kai-Fung Chang
- Applicant: Taiwan Semiconductor Manufacturing Co., Ltd.
- Applicant Address: TW Hsin-Chu
- Assignee: Taiwan Semiconductor Manufacturing Co., Ltd.
- Current Assignee: Taiwan Semiconductor Manufacturing Co., Ltd.
- Current Assignee Address: TW Hsin-Chu
- Agency: Eschweiler & Potashnik, LLC
- Main IPC: H01L27/146
- IPC: H01L27/146

Abstract:
A pad structure with a contact via array for high bond structure is provided. In some embodiments, a semiconductor substrate comprises a pad opening. An interconnect structure is under the semiconductor substrate, and comprises an interlayer dielectric (ILD) layer, a wiring layer, and the contact via array. The wiring layer and the contact via array are in the ILD layer. Further, the contact via array borders the wiring layer and is between the wiring layer and the semiconductor substrate. A pad covers the contact via array in the pad opening, and protrudes into the ILD layer to contact the wiring layer on opposite sides of the contact via array. A method for manufacturing the pad structure, as well as an image sensor with the pad structure, are also provided.
Public/Granted literature
- US20180342551A1 PAD STRUCTURE FOR BACKSIDE ILLUMINATED (BSI) IMAGE SENSORS Public/Granted day:2018-11-29
Information query
IPC分类: