- Patent Title: Metal-insulator-metal structure and methods of fabrication thereof
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Application No.: US16156779Application Date: 2018-10-10
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Publication No.: US10734474B2Publication Date: 2020-08-04
- Inventor: Chih-Fan Huang , Hung-Chao Kao , Yuan-Yang Hsiao , Tsung-Chieh Hsiao , Hsiang-Ku Shen , Hui-Chi Chen , Dian-Hau Chen , Yen-Ming Chen
- Applicant: Taiwan Semiconductor Manufacturing Co., Ltd.
- Applicant Address: TW Hsinchu
- Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD.
- Current Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD.
- Current Assignee Address: TW Hsinchu
- Agency: Haynes and Boone, LLP
- Main IPC: H01L49/02
- IPC: H01L49/02 ; H01L27/22 ; H01L21/311

Abstract:
A metal-insulator-metal (MIM) capacitor structure includes a semiconductor substrate and a bottom conductive layer above the semiconductor substrate. The bottom conductive layer has a slanted sidewall with respect to a top surface of the semiconductor substrate. The MIM capacitor structure further includes a top conductive layer above the bottom conductive layer. The top conductive layer has a vertical sidewall with respect to the top surface of the semiconductor substrate. The MIM capacitor structure further includes an insulating layer interposed between the bottom conductive layer and the top conductive layer. The insulating layer covers the slanted sidewall of the bottom conductive layer.
Public/Granted literature
- US20200035779A1 Metal-Insulator-Metal Structure and Methods of Fabrication Thereof Public/Granted day:2020-01-30
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