Invention Grant
- Patent Title: Gallium nitride substrate and manufacturing method of nitride semiconductor crystal
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Application No.: US15472604Application Date: 2017-03-29
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Publication No.: US10734485B2Publication Date: 2020-08-04
- Inventor: Yusuke Tsukada , Shuichi Kubo , Kazunori Kamada , Hideo Fujisawa , Tatsuhiro Ohata , Hirotaka Ikeda , Hajime Matsumoto , Yutaka Mikawa
- Applicant: MITSUBISHI CHEMICAL CORPORATION
- Applicant Address: JP Tokyo
- Assignee: MITSUBISHI CHEMICAL CORPORATION
- Current Assignee: MITSUBISHI CHEMICAL CORPORATION
- Current Assignee Address: JP Tokyo
- Agency: Oblon, McClelland, Maier & Neustadt, L.L.P.
- Priority: com.zzzhc.datahub.patent.etl.us.BibliographicData$PriorityClaim@548806fb com.zzzhc.datahub.patent.etl.us.BibliographicData$PriorityClaim@4c2873e1 com.zzzhc.datahub.patent.etl.us.BibliographicData$PriorityClaim@7438de6b
- Main IPC: H01L29/20
- IPC: H01L29/20 ; C30B25/00 ; C30B25/02 ; C30B29/40 ; H01L21/02 ; H01L33/00 ; H01L29/32 ; C30B25/20 ; H01L33/32 ; H01L33/12

Abstract:
The main purpose of the present invention is to provide: a nonpolar or semipolar GaN substrate, in which a nitride semiconductor crystal having a low stacking fault density can be epitaxially grown on the main surface of the substrate, and a technique required for the production of the substrate.This invention provides: a method for manufacturing an M-plane GaN substrate comprising; forming a mask pattern having a line-shaped opening parallel to an a-axis of a C-plane GaN substrate on an N-polar plane of the C-plane GaN substrate, growing a plane-shape GaN crystal of which thickness direction is an m-axis direction from the opening of the mask pattern by an ammonotharmal method, and cutting out the M-plane GaN substrate from the plane-shape GaN crystal.
Public/Granted literature
- US20170200789A1 GALLIUM NITRIDE SUBSTRATE AND MANUFACTURING METHOD OF NITRIDE SEMICONDUCTOR CRYSTAL Public/Granted day:2017-07-13
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