Invention Grant
- Patent Title: Thermal pattern sensor with pyroelectric capacitance and hard protective layer
-
Application No.: US16207653Application Date: 2018-12-03
-
Publication No.: US10734566B2Publication Date: 2020-08-04
- Inventor: Mohammed Benwadih , Christophe Serbutoviez
- Applicant: COMMISSARIAT A L'ENERGIE ATOMIQUE ET AUX ENERGIES ALTERNATIVES
- Applicant Address: FR Paris
- Assignee: COMMISSARIAT À L'ÉNERGIE ATOMIQUE ET AUX ÉNERGIES ALTERNATIVES
- Current Assignee: COMMISSARIAT À L'ÉNERGIE ATOMIQUE ET AUX ÉNERGIES ALTERNATIVES
- Current Assignee Address: FR Paris
- Agency: Pearne & Gordon LLP
- Priority: com.zzzhc.datahub.patent.etl.us.BibliographicData$PriorityClaim@236dbd52
- Main IPC: H01L37/02
- IPC: H01L37/02 ; G06K9/00 ; H01L27/16 ; G01J5/34

Abstract:
Thermal pattern sensor comprising several pixels arranged on a substrate, each pixel including at least: a pyroelectric capacitance formed by at least one portion of pyroelectric material arranged between at least one lower electrode and at least one upper electrode, with the lower electrode arranged between the substrate and the portion of pyroelectric material, a dielectric layer such that the upper electrode is arranged between the portion of pyroelectric material and the dielectric layer, a heating element including at least one deposition of electrically conductive particles and such that the dielectric layer is arranged between the upper electrode and the heating element, a protective layer arranged between the dielectric layer and the heating element and including at least one material of which the Shore A hardness is greater than or equal to around 60.
Public/Granted literature
- US20190172993A1 THERMAL PATTERN SENSOR WITH PYROELECTRIC CAPACITANCE AND HARD PROTECTIVE LAYER Public/Granted day:2019-06-06
Information query
IPC分类: