Invention Grant
- Patent Title: Trench-based microelectromechanical transducer and method for manufacturing the microelectromechanical transducer
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Application No.: US15962952Application Date: 2018-04-25
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Publication No.: US10737929B2Publication Date: 2020-08-11
- Inventor: Mohammad Abbasi Gavarti , Daniele Caltabiano , Anna Angela Pomarico , Giuditta Roselli
- Applicant: STMICROELECTRONIC S.r.l.
- Applicant Address: IT Agrate Brianza
- Assignee: STMICROELECTRONICS S.r.l.
- Current Assignee: STMICROELECTRONICS S.r.l.
- Current Assignee Address: IT Agrate Brianza
- Agency: Seed IP Law Group LLP
- Priority: com.zzzhc.datahub.patent.etl.us.BibliographicData$PriorityClaim@1d624135
- Main IPC: B81B3/00
- IPC: B81B3/00 ; H01L41/113 ; B81C1/00 ; G01L9/00

Abstract:
A microelectromechanical transducer includes: a semiconductor body, having a first surface and a second surface opposite to one another; a first structural body, coupled to the first surface of the semiconductor body; a first sealed cavity between the semiconductor body and the first structural body; and an active area housed in the first sealed cavity, including at least two trenches and a sensor element between the trenches. The trenches extend along a vertical direction from the first surface towards the second surface of the semiconductor body.
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