A substrate holder is provided. The substrate holder comprises a first holding member having a support surface supporting a substrate; and a second holding member sandwiching and holding the substrate together with the first holding member. The first holding member comprises a first contact point located along a periphery of the support surface. The second holding member comprises a second contact point configured to contact with the substrate placed on the support surface. The first contact point has a flat plate shape. The second contact point comprises a first end portion contacting with the substrate; and a second end portion contacting with the first contact point. The second end portion is configured to elastically contact with the first contact point when the substrate is held between the first holding member and the second holding member.