Invention Grant
- Patent Title: Method for determining and regulating a diameter of a single crystal during pulling of the single crystal
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Application No.: US15781850Application Date: 2017-01-24
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Publication No.: US10738392B2Publication Date: 2020-08-11
- Inventor: Thomas Schroeck , Thomas Aubrunner
- Applicant: SILTRONIC AG
- Applicant Address: DE Munich
- Assignee: SILTRONIC AG
- Current Assignee: SILTRONIC AG
- Current Assignee Address: DE Munich
- Agency: Brooks Kushman P.C.
- Priority: com.zzzhc.datahub.patent.etl.us.BibliographicData$PriorityClaim@3c05f62d
- International Application: PCT/EP2017/051446 WO 20170124
- International Announcement: WO2017/133930 WO 20170810
- Main IPC: C30B15/10
- IPC: C30B15/10 ; C30B15/22 ; C30B15/30 ; C30B29/06 ; C30B15/20

Abstract:
The diameter (dK) of a cylindrical section and of an end cone of a single crystal being pulled from a melt in a crucible, is determined by measuring the diameter (dK) of the single crystal at an interface with the melt while taking into account a lowering rate (vs) of a surface of the melt relative to the crucible, a lifting rate (vK) with which the crystal is raised relative to the crucible, and a conservation of mass, wherein a diameter of a cylindrical section of the single crystal, determined by means of observing a bright ring on the surface of the melt, and is used for a correction, a plausibility check or a comparison of the diameter (dK) of the single crystal.
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