Invention Grant
- Patent Title: Imprint apparatus and method for producing article
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Application No.: US15362568Application Date: 2016-11-28
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Publication No.: US10739674B2Publication Date: 2020-08-11
- Inventor: Yousuke Kondo
- Applicant: CANON KABUSHIKI KAISHA
- Applicant Address: JP Tokyo
- Assignee: Canon Kabushiki Kaisha
- Current Assignee: Canon Kabushiki Kaisha
- Current Assignee Address: JP Tokyo
- Agency: Canon U.S.A., Inc. I.P. Division
- Priority: com.zzzhc.datahub.patent.etl.us.BibliographicData$PriorityClaim@6e213a9b
- Main IPC: B29C59/02
- IPC: B29C59/02 ; G03F7/00

Abstract:
An imprint apparatus, to perform an imprinting process for bringing a mold and an imprint material on a substrate into contact with each other and curing the imprint material, includes a substrate deforming mechanism and a controller. The substrate deforming mechanism deforms the substrate in such a manner that a surface geometry of at least part of the substrate protrudes toward the mold. The controller determines a condition for the imprinting process on a shot area of the substrate based on the surface geometry of the shot area when the mold is brought into contact with the imprint material on the shot area.
Public/Granted literature
- US20170157810A1 IMPRINT APPARATUS AND METHOD FOR PRODUCING ARTICLE Public/Granted day:2017-06-08
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