Invention Grant
- Patent Title: Cross-linkable fluorinated photopolymer
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Application No.: US16371372Application Date: 2019-04-01
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Publication No.: US10739680B2Publication Date: 2020-08-11
- Inventor: Charles Warren Wright , Douglas Robert Robello , John Andrew Defranco , Diane Carol Freeman , Frank Xavier Byrne
- Applicant: Orthogonal, Inc.
- Applicant Address: US NY Rochester
- Assignee: Orthogonal, Inc.
- Current Assignee: Orthogonal, Inc.
- Current Assignee Address: US NY Rochester
- Agency: Merchant & Gould P.C.
- Main IPC: G03F7/038
- IPC: G03F7/038 ; G03F7/40 ; G03F7/20 ; G03F7/30 ; H01L21/027 ; C08F220/34 ; G03F7/004 ; G03F7/075 ; H01L21/3105 ; H01L21/311 ; G03F7/11
Abstract:
A photosensitive composition is disclosed including a fluorinated photo cross-linkable polymer provided in a fluorinated solvent such as a hydrofluoroether. The photo cross-linkable polymer includes a first repeating unit having a fluorine-containing group but not a cinnamate group, and a second repeating unit having a fluorine-containing cinnamate group. The polymer has a total fluorine content in a range of 30 to 60% by weight. The composition can be used to form patterned barrier or dielectric structures over substrates and devices such as organic electronic devices.
Public/Granted literature
- US20190227436A1 CROSS-LINKABLE FLUORINATED PHOTOPOLYMER Public/Granted day:2019-07-25
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