Invention Grant
- Patent Title: Impedance matching network and method
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Application No.: US16839424Application Date: 2020-04-03
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Publication No.: US10741364B1Publication Date: 2020-08-11
- Inventor: Tomislav Lozic , Imran Bhutta , Ronald Decker , Bala Kandampalayam
- Applicant: Reno Technologies, Inc.
- Applicant Address: US DE Wilmington
- Assignee: RENO TECHNOLOGIES, INC.
- Current Assignee: RENO TECHNOLOGIES, INC.
- Current Assignee Address: US DE Wilmington
- Agency: The Belles Group, P.C.
- Main IPC: H03H7/38
- IPC: H03H7/38 ; H01J37/32 ; H01L21/285 ; H01L21/67 ; H01L21/02 ; H01L21/311 ; H01L21/3213

Abstract:
In one embodiment, the present disclosure may be directed to a matching network coupled to an RF source and a plasma chamber and including an electronically variable capacitor (EVC) and a control circuit. The control circuit receives parameter signals and determines corresponding parameter values. For each parameter value, the control circuit determines whether the parameter value is relevant to the matching activity and whether the parameter value is relevant to a second activity of the matching network. The matching network carries out the matching activity based on the parameter values determined to be relevant to the matching activity, and carries out the second activity based on the parameter values determined to be relevant to the second activity.
Public/Granted literature
- US20200234926A1 IMPEDANCE MATCHING NETWORK AND METHOD Public/Granted day:2020-07-23
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