Invention Grant
- Patent Title: Electronic components having three-dimensional capacitors in a metallization stack
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Application No.: US15062143Application Date: 2016-03-06
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Publication No.: US10741486B2Publication Date: 2020-08-11
- Inventor: Klaus Reingruber , Sven Albers , Christian Geissler
- Applicant: Intel IP Corporation
- Applicant Address: US CA Santa Clara
- Assignee: Intel Corporation
- Current Assignee: Intel Corporation
- Current Assignee Address: US CA Santa Clara
- Agency: Patent Capital Group
- Main IPC: H01L23/498
- IPC: H01L23/498 ; H01L23/00 ; H01L21/48 ; H01L21/56 ; H05K1/16 ; H01L23/538 ; H01L23/31 ; H01L23/522

Abstract:
Disclosed herein are electronic components having three-dimensional capacitors disposed in a metallization stack, as well as related methods and devices. In some embodiments, for example, an electronic component may include: a metallization stack and a capacitor disposed in the metallization stack wherein the capacitor includes a first conductive plate having a plurality of recesses, and a second conductive plate having a plurality of projections, wherein individual projections of the plurality of projections extend into corresponding individual recesses of the plurality of recesses without contacting the first conductive plate.
Public/Granted literature
- US20170256480A1 ELECTRONIC COMPONENTS HAVING THREE-DIMENSIONAL CAPACITORS IN A METALLIZATION STACK Public/Granted day:2017-09-07
Information query
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