Invention Grant
- Patent Title: Integration of electrostatic discharge protection into vertical fin technology
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Application No.: US16185745Application Date: 2018-11-09
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Publication No.: US10741544B2Publication Date: 2020-08-11
- Inventor: Brent A. Anderson , Huiming Bu , Terence B. Hook , Xuefeng Liu , Junli Wang
- Applicant: International Business Machines Corporation
- Applicant Address: US NY Armonk
- Assignee: INTERNATIONAL BUSINESS MACHINES CORPORATION
- Current Assignee: INTERNATIONAL BUSINESS MACHINES CORPORATION
- Current Assignee Address: US NY Armonk
- Agency: Cantor Colburn LLP
- Agent Vazken Alexanian
- Main IPC: H01L29/66
- IPC: H01L29/66 ; H01L27/02 ; H01L29/78

Abstract:
A method of fabricating a semiconductor device includes forming one or more fins on a substrate. The method includes forming a first active area and a second active area, each including an n-type dopant, on the substrate at opposing ends of the one or more fins. The method further includes forming a third active area including a p-type dopant on the substrate adjacent to the first active area and the second active area.
Public/Granted literature
- US20200152619A1 INTEGRATION OF ELECTROSTATIC DISCHARGE PROTECTION INTO VERTICAL FIN TECHNOLOGY Public/Granted day:2020-05-14
Information query
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