Invention Grant
- Patent Title: Nonvolatile memory devices having single-layered gates and methods of fabricating the same
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Application No.: US15399471Application Date: 2017-01-05
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Publication No.: US10741570B2Publication Date: 2020-08-11
- Inventor: Sung Kun Park
- Applicant: SK hynix Inc.
- Applicant Address: KR Gyeonggi-do
- Assignee: SK hynix Inc.
- Current Assignee: SK hynix Inc.
- Current Assignee Address: KR Gyeonggi-do
- Agency: IP & T Group LLP
- Priority: com.zzzhc.datahub.patent.etl.us.BibliographicData$PriorityClaim@688c7410
- Main IPC: H01L27/11548
- IPC: H01L27/11548 ; H01L29/66 ; H01L21/768 ; H01L21/28 ; H01L29/423 ; H01L29/788 ; H01L23/522 ; H01L27/11521 ; H01L27/11556 ; H01L29/45 ; H01L21/285

Abstract:
A nonvolatile memory device includes an active region extending in a first direction and including a source region and a drain region that are respectively disposed at both ends of the active region, a gate electrode pattern extending in a second direction and disposed between the source region and the drain region, wherein the second direction extends across the first direction, a gate insulation pattern disposed between the gate electrode pattern and the active region, a source contact plug and a drain contact plug respectively coupled to the source region and the drain region, and a coupling contact plug disposed over the gate electrode pattern and insulated from the gate electrode pattern.
Public/Granted literature
- US20170117287A1 NONVOLATILE MEMORY DEVICES HAVING SINGLE-LAYERED GATES AND METHODS OF FABRICATING THE SAME Public/Granted day:2017-04-27
Information query
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