Invention Grant
- Patent Title: Semiconductor memory
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Application No.: US16287233Application Date: 2019-02-27
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Publication No.: US10741573B2Publication Date: 2020-08-11
- Inventor: Go Oike
- Applicant: Toshiba Memory Corporation
- Applicant Address: JP Tokyo
- Assignee: TOSHIBA MEMORY CORPORATION
- Current Assignee: TOSHIBA MEMORY CORPORATION
- Current Assignee Address: JP Tokyo
- Agency: Kim & Stewart LLP
- Priority: com.zzzhc.datahub.patent.etl.us.BibliographicData$PriorityClaim@612f52d4
- Main IPC: H01L27/11578
- IPC: H01L27/11578 ; H01L27/11582 ; H01L23/528 ; H01L27/11556 ; H01L23/522 ; H01L27/11551 ; H01L27/11514 ; H01L27/1156 ; H01L27/11521 ; H01L27/11553 ; H01L27/1157 ; H01L27/06 ; H01L23/532

Abstract:
A semiconductor memory includes first to fourth stacked bodies. The first stacked body includes a first conductor, and an alternating stack of first insulators and second conductors above the first conductor in a region. The second stacked body includes a third conductor, and an alternating stack of second insulators and fourth conductors above the third conductor in another region. The third stacked body includes a fifth conductor adjacent to the first conductor via a third insulator in a separation region. The fourth stacked body includes a seventh conductor adjacent to the third conductor via a fifth insulator in the separation region. The fifth conductor is electrically insulated from the seventh conductor.
Public/Granted literature
- US20190371811A1 SEMICONDUCTOR MEMORY Public/Granted day:2019-12-05
Information query
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