Invention Grant
- Patent Title: Memory cells and memory array structures including RRAM, and fabrication methods thereof
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Application No.: US15927665Application Date: 2018-03-21
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Publication No.: US10741610B2Publication Date: 2020-08-11
- Inventor: Sheng Fen Chiu , Heng Cao
- Applicant: Semiconductor Manufacturing International (Shanghai) Corporation , Semiconductor Manufacturing International (Beijing) Corporation
- Applicant Address: CN Shanghai CN Beijing
- Assignee: Semiconductor Manufacturing International (Shanghai) Corporation,Semiconductor Manufacturing International (Beijing) Corporation
- Current Assignee: Semiconductor Manufacturing International (Shanghai) Corporation,Semiconductor Manufacturing International (Beijing) Corporation
- Current Assignee Address: CN Shanghai CN Beijing
- Agency: Anova Law Group, PLLC
- Priority: com.zzzhc.datahub.patent.etl.us.BibliographicData$PriorityClaim@54568b59
- Main IPC: H01L27/24
- IPC: H01L27/24 ; H01L29/06 ; H01L21/265 ; H01L45/00 ; H01L21/762

Abstract:
A memory cell includes a substrate including a first diode region, a second diode region, a third diode region, and a fourth diode region, a first well region formed in the first diode region and the second diode region, a second well region formed in the third diode region and the fourth diode region, a doped conductive region formed on the first well region and the second well region, and a deep trench isolation structure formed in the substrate to electrically isolate different portions of each of the first well region, the second well region, and the doped conductive region formed over different diode regions. The second well region and the first well region have different doping types. The memory cell includes a resistance random access memory device formed over the substrate and electrically connected to the doped conductive region in the second diode region and the third diode region.
Public/Granted literature
- US20180277600A1 MEMORY CELLS AND MEMORY ARRAY STRUCTURES, AND FABRICATION METHODS THEREOF Public/Granted day:2018-09-27
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