Invention Grant
- Patent Title: Semiconductor device and method for manufacturing same
-
Application No.: US16336481Application Date: 2017-09-21
-
Publication No.: US10741696B2Publication Date: 2020-08-11
- Inventor: Masahiko Suzuki , Hajime Imai , Hideki Kitagawa , Tetsuo Kikuchi , Setsuji Nishimiya , Teruyuki Ueda , Kengo Hara , Tohru Daitoh , Toshikatsu Itoh
- Applicant: Sharp Kabushiki Kaisha
- Applicant Address: JP Sakai
- Assignee: SHARP KABUSHIKI KAISHA
- Current Assignee: SHARP KABUSHIKI KAISHA
- Current Assignee Address: JP Sakai
- Agency: Keating & Bennett, LLP
- Priority: com.zzzhc.datahub.patent.etl.us.BibliographicData$PriorityClaim@68ed6a8f
- International Application: PCT/JP2017/034071 WO 20170921
- International Announcement: WO2018/061969 WO 20180405
- Main IPC: H01L29/786
- IPC: H01L29/786 ; G02F1/1343 ; G02F1/1345 ; G02F1/1368 ; H01L21/02 ; H01L27/12 ; H01L29/24 ; H01L29/66 ; G02F1/1362

Abstract:
A semiconductor device includes a thin film transistor including a semiconductor layer, a gate electrode, a gate insulating layer, a source electrode, a drain electrode, the semiconductor layer includes a layered structure including a first oxide semiconductor layer including In and Zn, in which an atomic ratio of In with respect to all metallic elements included in the first oxide semiconductor layer is higher than an atomic ratio of Zn, a second oxide semiconductor layer including In and Zn, in which an atomic ratio of Zn with respect to all metallic elements included in the second oxide semiconductor layer is higher than an atomic ratio of In, and an intermediate oxide semiconductor layer arranged between the first oxide semiconductor layer and the second oxide semiconductor layer, and the first and second oxide semiconductor layers are crystalline oxide semiconductor layers, and the intermediate oxide semiconductor layer is an amorphous oxide semiconductor layer, and the first oxide semiconductor layer is arranged nearer to the gate insulating layer than the second oxide semiconductor layer.
Public/Granted literature
- US20190326443A1 SEMICONDUCTOR DEVICE AND METHOD FOR MANUFACTURING SAME Public/Granted day:2019-10-24
Information query
IPC分类: