Invention Grant
- Patent Title: Self-alignment process for micro light emitting diode using back-side exposure
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Application No.: US16356850Application Date: 2019-03-18
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Publication No.: US10741717B1Publication Date: 2020-08-11
- Inventor: Celine Claire Oyer , David Massoubre , Tilman Zehender
- Applicant: Facebook Technologies, LLC
- Applicant Address: US CA Menlo Park
- Assignee: Facebook Technologies, LLC
- Current Assignee: Facebook Technologies, LLC
- Current Assignee Address: US CA Menlo Park
- Agency: Fenwick & West LLP
- Main IPC: H01L33/00
- IPC: H01L33/00 ; H01L33/40 ; H01L33/44 ; H01L33/32

Abstract:
Embodiments relate to a micro light-emitting-diode (μLED) fabricated using a self-aligned process. To fabricate the μLED, a metal layer is deposited on a p-type semiconductor. The p-type semiconductor is on an n-type semiconductor and the n-type semiconductor is on a top side of a substrate. The metal layer is patterned to define a p-metal. The p-type semiconductor is etched using the p-metal as an etch mask. Similarly, the n-type semiconductor is etched using the p-metal and the p-type semiconductor as an etch mask. A negative photoresist layer is deposited over the patterned p-metal and the p-type semiconductor. The negative photoresist is then exposed from the back side of the substrate, thus exposing the regions of the negative photoresist that are not masked by the p-metal. The negative photoresist is then developed to expose the p-metal.
Information query
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