Invention Grant
- Patent Title: Elastic wave device
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Application No.: US15651093Application Date: 2017-07-17
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Publication No.: US10741745B2Publication Date: 2020-08-11
- Inventor: Yasumasa Taniguchi
- Applicant: Murata Manufacturing Co., Ltd.
- Applicant Address: JP Kyoto
- Assignee: MURATA MANUFACTURING CO., LTD.
- Current Assignee: MURATA MANUFACTURING CO., LTD.
- Current Assignee Address: JP Kyoto
- Agency: Keating & Bennett, LLP
- Priority: com.zzzhc.datahub.patent.etl.us.BibliographicData$PriorityClaim@211511de
- Main IPC: H03H9/145
- IPC: H03H9/145 ; H01L41/047 ; H03H9/02 ; H03H9/05 ; H03H9/10 ; H01L41/053 ; H01L41/107 ; H01L41/35

Abstract:
An elastic wave device includes a piezoelectric substrate with first and second main surfaces internally facing each other, an elastic-wave element that includes an interdigital transducer electrode provided on or in the first main surface of the piezoelectric substrate, and a first protective film that is provided on the first main surface of the piezoelectric substrate so as to cover the IDT electrode. The IDT electrode includes a main electrode layer made of a metal having a density higher than that of the first protective film. The piezoelectric substrate has a thickness of about 0.35 mm or smaller, and irregularities are located on the second main surface.
Public/Granted literature
- US20180062063A1 ELASTIC WAVE DEVICE Public/Granted day:2018-03-01
Information query
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