Invention Grant
- Patent Title: Methods of making sealed resistive change elements
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Application No.: US16510952Application Date: 2019-07-14
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Publication No.: US10741761B2Publication Date: 2020-08-11
- Inventor: C. Rinn Cleavelin , Claude L. Bertin , Thomas Rueckes
- Applicant: Nantero, Inc.
- Applicant Address: US MA Woburn
- Assignee: Nantero, Inc.
- Current Assignee: Nantero, Inc.
- Current Assignee Address: US MA Woburn
- Agency: Nantero, Inc.
- Main IPC: H01L45/00
- IPC: H01L45/00 ; H01L27/24

Abstract:
Methods for scaling dimensions of resistive change elements, resistive change element arrays of scalable resistive change elements, and sealed resistive change elements are disclosed. According to some aspects of the present disclosure the methods for scaling dimensions of resistive change elements and the resistive change element arrays of scalable resistive change elements reduce the impact of overlapping materials on the switching characteristics of resistive change elements. According to some aspects of the present disclosure the methods for scaling dimensions of resistive change elements include sealing surfaces of resistive change elements. According to some aspects of the present disclosure the methods for scaling dimensions of resistive change elements include forming barriers to copper migration in a copper back end of the line.
Public/Granted literature
- US20190341550A1 Methods of Making Sealed Resistive Change Elements Public/Granted day:2019-11-07
Information query
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