Invention Grant
- Patent Title: Microphone and pressure sensor package and method of producing the microphone and pressure sensor package
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Application No.: US16312058Application Date: 2017-06-14
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Publication No.: US10743112B2Publication Date: 2020-08-11
- Inventor: Willem Frederik Adrianus Besling
- Applicant: Sciosense B.V.
- Applicant Address: NL AE Eindhoven
- Assignee: SCIOSENSE B.V.
- Current Assignee: SCIOSENSE B.V.
- Current Assignee Address: NL AE Eindhoven
- Agency: Slater Matsil, LLP
- Priority: com.zzzhc.datahub.patent.etl.us.BibliographicData$PriorityClaim@78d98260
- International Application: PCT/EP2017/064630 WO 20170614
- International Announcement: WO2017/220419 WO 20171228
- Main IPC: H04R19/04
- IPC: H04R19/04 ; B81B7/00 ; H04R1/04 ; H04R19/00 ; B81B7/02 ; B81C1/00 ; H01L23/00 ; H04R31/00

Abstract:
The microphone and pressure sensor package comprises a carrier (1) with an opening (16), a microphone device (20) including a diaphragm (21) and a perforated back plate (22) arranged above the opening (16), an ASIC device (6), and a cover (9) forming a cavity (17) between the carrier (1) and the cover (9). The ASIC device (6) and the microphone device (20) are arranged in the cavity (17). A sensor element (7) provided for a pressure sensor is integrated in the ASIC device (6). The pressure outside the cavity (17) is transferred to the sensor element (7) through the opening (16), the diaphragm (21), and the back plate (22).
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