Invention Grant
- Patent Title: Method and device for generating electromagnetic radiation by means of a laser-produced plasma
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Application No.: US16566896Application Date: 2019-09-11
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Publication No.: US10743397B2Publication Date: 2020-08-11
- Inventor: Duane Edward Hudgins , Reza Shokrollah Abhari
- Applicant: ETH Zürich
- Applicant Address: CH Zürich
- Assignee: ETH ZÜRICH
- Current Assignee: ETH ZÜRICH
- Current Assignee Address: CH Zürich
- Agency: Soroker Agmon Nordman
- Main IPC: H05G2/00
- IPC: H05G2/00

Abstract:
The invention relates to a method for generating electromagnetic radiation by a laser-produced plasma, wherein a target comprising a target material is provided, at least one pulse sequence is directed to said target, wherein the pulse sequence comprises four to nine conditioning laser pulses, wherein time intervals between subsequent conditioning laser pulses are 200 ns or less, and a main laser pulse is directed to said target along a first axis, such that a radiation-emitting plasma is formed from at least a part of said target material. The invention further relates to a device for generating electromagnetic radiation by means of a laser-produced plasma comprising a dispensing device and at least one laser source, wherein the device is configured such that at least one pulse sequence comprising four to nine conditioning laser pulses and a main laser pulse can be generated by the at least one laser source.
Public/Granted literature
- US20200084870A1 METHOD AND DEVICE FOR GENERATING ELECTROMAGNETIC RADIATION BY MEANS OF A LASER-PRODUCED PLASMA Public/Granted day:2020-03-12
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