Invention Grant
- Patent Title: Method for polishing wafer and polishing apparatus
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Application No.: US15768970Application Date: 2016-10-17
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Publication No.: US10744615B2Publication Date: 2020-08-18
- Inventor: Kazuya Sato , Hiromasa Hashimoto , Naoki Kamihama
- Applicant: SHIN-ETSU HANDOTAI CO., LTD.
- Applicant Address: JP Tokyo
- Assignee: SHIN-ETSU HANDOTAI CO., LTD.
- Current Assignee: SHIN-ETSU HANDOTAI CO., LTD.
- Current Assignee Address: JP Tokyo
- Agency: Oliff PLC
- Priority: com.zzzhc.datahub.patent.etl.us.BibliographicData$PriorityClaim@711eb784
- International Application: PCT/JP2016/004596 WO 20161017
- International Announcement: WO2017/077691 WO 20170511
- Main IPC: B24B37/013
- IPC: B24B37/013 ; B24B37/04 ; B24B37/20 ; B24B49/12 ; H01L21/66 ; H01L21/306 ; B24B37/34 ; H01L21/304

Abstract:
The present invention provides a method for polishing a wafer including, after unloading and before loading to hold a next wafer to be polished: measurement to measure a depth PDt of a concave portion of a template after taking out a polished wafer; calculation to calculate a difference ΔPD between the measured depth PDt of the concave portion and a depth PD0 of the concave portion of the template before being used for polishing; and adjustment to adjust polishing conditions for a next wafer to be polished in accordance with the calculated difference ΔPD. Consequently, there are provided the method for polishing a wafer and a polishing apparatus which enable adjusting a fluctuation in flatness of each wafer caused due to a fluctuation in numerical value of a pocket depth of a template.
Public/Granted literature
- US20180290261A1 METHOD FOR POLISHING WAFER AND POLISHING APPARATUS Public/Granted day:2018-10-11
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