Transport system, control method, processing system, and manufacturing method of article
Abstract:
An embodiment includes a plurality of transport modules forming a transport path on which a carriage travels and a plurality of control units each provided to corresponding one of the plurality of transport modules and configured to perform position control of the carriage in accordance with a pre-stored drive condition and a control start timing, and one of the plurality of control units which corresponds to a first transport module that is one of the plurality of transport modules corrects the drive condition by using a difference between an entry timing at which the carriage enters the first transport module and the control start timing.
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