Invention Grant
- Patent Title: Compact thermal reactor for rapid growth of high quality carbon nanotubes (CNTs) produced by chemical process with low power consumption
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Application No.: US14721284Application Date: 2015-05-26
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Publication No.: US10745280B2Publication Date: 2020-08-18
- Inventor: Prabhash Mishra , Saikh Saiful Islam
- Applicant: Department of Electronics and Information Technology (DEITY) , Jamia Millia Islamia University
- Applicant Address: IN New Delhi IN New Delhi
- Assignee: Department of Electronics and Information Technology (DEITY),Jamia Millia Islamia University
- Current Assignee: Department of Electronics and Information Technology (DEITY),Jamia Millia Islamia University
- Current Assignee Address: IN New Delhi IN New Delhi
- Agency: The Webb Law Firm
- Main IPC: C23C16/00
- IPC: C23C16/00 ; C01B32/16
Abstract:
The invention relates to a compact thermal reactor for rapid growth of high quality carbon nanotubes (CNT2) produced by chemical process with low power consumption comprising: a processing chamber having a vacuum vessel, the vacuum vessel having a side cover formed of a first side wall and a second side wall, a top cover, a bottom cover connected to a support stand; feed through housing provided with a substrate; a heating system consisting of a heating element and back means; and at least one each inlet and outlet for gas injection into the process chamber for growing high quality carbon nanotubes over the substrate.
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