Invention Grant
- Patent Title: Vanadium oxide film and process for producing same
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Application No.: US15520339Application Date: 2015-10-26
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Publication No.: US10745289B2Publication Date: 2020-08-18
- Inventor: Tetsuo Tsuchiya , Haruo Ishizaki , Tomohiko Nakajima , Kentaro Shinoda
- Applicant: NATIONAL INSTITUTE OF ADVANCED INDUSTRIAL SCIENCE AND TECHNOLOGY
- Applicant Address: JP Tokyo
- Assignee: NATIONAL INSTITUTE OF ADVANCED INDUSTRIAL SCIENCE AND TECHNOLOGY
- Current Assignee: NATIONAL INSTITUTE OF ADVANCED INDUSTRIAL SCIENCE AND TECHNOLOGY
- Current Assignee Address: JP Tokyo
- Agency: Studebaker & Brackett PC
- Priority: com.zzzhc.datahub.patent.etl.us.BibliographicData$PriorityClaim@4d7a04f
- International Application: PCT/JP2015/080110 WO 20151026
- International Announcement: WO2016/068076 WO 20160506
- Main IPC: C01G31/02
- IPC: C01G31/02 ; C01G31/00 ; C01G53/00 ; C01G49/00 ; H01L21/02 ; G01J5/00

Abstract:
Provided is a vanadium oxide film which shows substantially no hysteresis of resistivity changes due to temperature rising/falling, has a low resistivity at room temperature, has a large absolute value of the temperature coefficient of resistance, and shows semiconductor-like resistance changes in a wide temperature range. In the vanadium oxide film, a portion of the vanadium has been replaced by aluminum and copper, and the amount of substance of aluminum is 10 mol % based on the sum total of the amount of substance of vanadium, the amount of substance of aluminum, and the amount of substance of copper. This vanadium oxide film has a low resistivity, has a large absolute value of the temperature coefficient of resistance, and shows substantially no hysteresis of resistivity changes due to temperature rising/falling. This vanadium oxide film is produced by applying a mixture solution containing a vanadium organic compound, an aluminum organic compound, and a copper organic compound to a substrate, calcining the substrate at a temperature lower than the temperature at which the substrate decomposes, and irradiating the surface of the substrate onto which the mixture solution has been applied with ultraviolet light.
Public/Granted literature
- US20170313595A1 VANADIUM OXIDE FILM AND PROCESS FOR PRODUCING SAME Public/Granted day:2017-11-02
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