Invention Grant
- Patent Title: Configuration and method of operation of an electrodeposition system for improved process stability and performance
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Application No.: US15785333Application Date: 2017-10-16
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Publication No.: US10745817B2Publication Date: 2020-08-18
- Inventor: Kousik Ganesan , Tighe A. Spurlin , Jonathan David Reid , Shantinath Ghongadi , Andrew John McKerrow , James E. Duncan
- Applicant: Novellus Systems, Inc.
- Applicant Address: US CA Fremont
- Assignee: Novellus Systems, Inc.
- Current Assignee: Novellus Systems, Inc.
- Current Assignee Address: US CA Fremont
- Agency: Weaver Austin Villeneuve & Sampson LLP
- Main IPC: C25D3/38
- IPC: C25D3/38 ; C25D5/00 ; C25D5/08 ; C25D7/12 ; C25D17/00 ; C25D21/04 ; C25D21/14

Abstract:
In one aspect, an apparatus includes a plating cell, a degassing device configured to remove oxygen from the plating solution prior to the plating solution flowing into the plating cell; an oxidation station configured to increase an oxidizing strength of the plating solution after the plating solution flows out of the plating cell; and a controller. The controller includes program instructions for causing a process that includes operations of: reducing an oxygen concentration of the plating solution where the plating solution contains a plating accelerator; then, contacting a wafer substrate with the plating solution having reduced oxygen concentration and electroplating a metal such that the electroplating causes a net conversion of the accelerator to a less-oxidized accelerator species within the plating cell; then increasing the oxidizing strength of the plating solution causing a net re-conversion of the less-oxidized accelerator species back to the accelerator outside the plating cell.
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