Invention Grant
- Patent Title: Device for interferometric distance measurement
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Application No.: US16047691Application Date: 2018-07-27
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Publication No.: US10746532B2Publication Date: 2020-08-18
- Inventor: Markus Meissner , Wolfgang Holzapfel
- Applicant: DR. JOHANNES HEIDENHAIN GmbH
- Applicant Address: DE Traunreut
- Assignee: DR. JOHANNES HEIDENHAIN GMBH
- Current Assignee: DR. JOHANNES HEIDENHAIN GMBH
- Current Assignee Address: DE Traunreut
- Agency: Hunton Andrews Kurth LLP
- Priority: com.zzzhc.datahub.patent.etl.us.BibliographicData$PriorityClaim@2a395f4e
- Main IPC: G01B11/14
- IPC: G01B11/14 ; G01B11/02 ; G01S17/36 ; G01B9/02 ; G01S17/10 ; H01S3/00 ; H01S3/067 ; H01S3/08 ; H01S3/094 ; H01S3/0941 ; H01S3/10 ; H01S3/102 ; H01S3/106 ; H01S3/16

Abstract:
An interferometric distance measurement device includes a multiple wavelength light source, supplying a light beam having at least three different wavelengths. An interferometer unit is provided, which splits the light beam into a measuring light beam and a reference light beam. The measuring and reference light beams reflected back by measuring and reference reflectors are superimposed in an interfering manner to form an interference light beam. The interference light beam is split via a detection unit such that, in each instance, a plurality of phase-shifted, partial interference signals result per wavelength. With the aid of a signal processing unit, an absolute position information item regarding the measuring reflector is determined from the partial interference signals of different wavelengths.
Public/Granted literature
- US20190041193A1 DEVICE FOR INTERFEROMETRIC DISTANCE MEASUREMENT Public/Granted day:2019-02-07
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