- Patent Title: Relative position detection means and displacement detection device
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Application No.: US16053590Application Date: 2018-08-02
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Publication No.: US10746533B2Publication Date: 2020-08-18
- Inventor: Shun Okuyama , Akinori Suzuki
- Applicant: Dmg Mori Co., Ltd.
- Applicant Address: JP Yamatokoriyama-Shi, Nara
- Assignee: DMG MORI CO., LTD.
- Current Assignee: DMG MORI CO., LTD.
- Current Assignee Address: JP Yamatokoriyama-Shi, Nara
- Agency: Stevens Law Group
- Agent David R. Stevens
- Priority: com.zzzhc.datahub.patent.etl.us.BibliographicData$PriorityClaim@4333ce35 com.zzzhc.datahub.patent.etl.us.BibliographicData$PriorityClaim@1c313abd com.zzzhc.datahub.patent.etl.us.BibliographicData$PriorityClaim@2bcd9e1f com.zzzhc.datahub.patent.etl.us.BibliographicData$PriorityClaim@76a0ca47
- Main IPC: G03F7/20
- IPC: G03F7/20 ; G01B11/14 ; G01D5/34 ; G01D5/28 ; G01D5/30 ; G01B11/26 ; G02B5/30 ; G02B6/34 ; G02B27/28

Abstract:
Example position detection means and displacement detection devices are described. A relative position detection means optically detects a relative position of displacement of an object to be measured in a measuring direction, including a target mounted on the object to be measured and irradiated with light from a light source; a light receiver for detection of relative position for receiving light by changing polarization state of reflected light at the target with respect to the light; and a relative position information output unit for outputting relative position information based on displacement of the target in the measuring direction based on change of polarization state of the reflected light. The target includes a reflector mounted on the object to be measured and a birefringent member on the reflector and having a thickness changing from a tip to a base end along the measuring direction.
Public/Granted literature
- US20190041194A1 Relative Position Detection Means And Displacement Detection Device Public/Granted day:2019-02-07
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